DESCRIPTION
The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7801A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7801D) has a hole in the Pyrex glass at the backside of the sensor.

FEATURES
*Uncompensated pressure sensor die
*Output Span 150mV @ 5V
*Temperature Range -40°…+125°C
*Linearity 0.05% (typical)
*Small Die Size 1.98 x 1.84mm
*Low Cost, High reliability

APPLICATION
*For absolute or differential pressure sensor systems
*Barometers, Altimeters
*Variometers

MS7801-A, MS7801-A_0.2, MS7801-D

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DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor.

FEATURES
*Uncompensated pressure sensor die
*High Sensitivity: Output Span 240 mV @ 5V
*Temperature Range -40°C …+ 125°C
*Linearity 0.15 % (typical)
*Small Die Size 2.00 X 1.86 mm
*Low cost, High reliability

APPLICATION
*For high resolution absolute sensor systems
*Engine Controls
*Barometers, Altimeters, Variometers

MS761-A, MS761-A_0.2, MS761-D

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DESCRIPTION
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure,
applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.
To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.

FEATURES
· Media resistive pressure sensor die
· Output Span 150mV @ 5 V
· Temperature Range -40°…+125°C
· Linearity 0.05% (typical)
· Die Size 1.63 x 1.95 mm2
· Low Cost, High reliability

APPLICATION
· Harsh environments
· Absolute pressure sensor systems
· Braking systems
· Tire pressure
· Engine controls
· Diving computers

MS7212-A
TAG Die, Sensor

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